Lab News

Thin films with micrometer-small holes are in demand for a variety of applications, such as filters in environmental or medical technology. The short wavelength of UV ultrashort pulse laser radiation enables drilling of micrometer holes with high precision and minimal thermal impact.

The versatility of ultrafast laser radiation is extended by a precision polishing process based on tailored surface melting.

The shorter wavelength offers tighter focusing and increased absorption that enables high precision structuring. The prototype UV micro scanner achieves excellent quality and repeatability for surface structuring with feature sizes down to 400 nm.

In the project “FOCUS” we develop a sensor-based position detection and control system to combine the best of two worlds: The flexibility of a commercial, cost-effective 6-axis robot and the precision of ultrashort pulsed microstructuring.

In the project “FOCUS” we develop a sensor-based position detection and control system to combine the best of two worlds: The flexibility of a commercial, cost-effective 6-axis robot and the precision of ultrashort pulsed microstructuring.

One of the key technologies to increase productivity of laser micromachining and maintain the high level of surface quality is multibeam processing. The multibeam technology has already found its way into industrial production for consumer electronics or medical products. Here, the generation of flexible surface structures for embossing tools or micro-drillings for filter applications with feature sizes down to 1 µm have been demonstrated.